Inspect defects on the metal mask/stencil by optical lens capturing system. The inspection system can reduce damages and promote product quality.
Applicable aperture: 80um up
Foreign object , small nick, protrusion, shortage of diameter, etc.
Smooth or regular defect, for example, additional or miss aperture, aperture shift.
Max Inspection area: 750mm x 750mm x 30mm
Line width, Space width, Circular, Rectangle, Rotated Rectangle, Central distance, Gap Distance, Long Distance
Traditional Chinese, Simplified Chinese, Japanese and English.