To determine defect by user's parameters and system embedded logic. Simple for operation and no need reference required. Inspect irregular broken/connection, pinhole, dirt, protrusion, violate minimum line/space width etc.
Locate the photomask and start and end position then one click hot key for starting inspection.
When parameter or image changed, system will update new defect detected results and display. What you see is what you inspect.
When parameter or image changed, system will update new defect detected results and display. What you see is what you inspect.
To avoid false defect which are made on purpose.
To avoid false defect which are made on purpose.
Data reference：To compare captured image with reference data. We emphasized that lost PAD on the photomask, image shifted and change of pattern size.
Can inspection defects, such as shift PAD, bigger aperture, smaller aperture, miss aperture or additional aperture
Enhance to Inspect the protrusion on circuit.
