Film / Photomask / Reticle Inspection system

TSL-FVT-DX6.0

Application

Inspect defects on the film/ photomask by optical lens capturing system. The inspection system can reduce damages and promote product quality. With adjustable magnification lens, you can adjust the magnification for different specifications of the sample, the application is more flexibility.

Performance

Inspection time：
    < 35 sec 5 µm/pixel (Inspection area：500 x 400mm)
Inspection ability：
  • Minimum line /space width : down to 15µm
  • Minimum defects size : 5 µm
  • Lens resolution : 1.5~5.5 um/pixel
Inspection mode(Design Rule Check)：
  • To determine defect by user's parameters and system embedded logic.
  • Simple for operation and no need reference required.
  • Inspect irregular broken/connection, pinhole, dirt, protrusion, violate minimum line/space width etc.
Easy Parameter Setting：
    Automatic core parameter, Dust Sweep, Ignore Blank Area, Skip Model, etc.
What your see is what you inspect.：
    When parameter or image changed, system will update new defect detected results and display. No need to re-scan process.
Review on Fly：
  • When parameter or image changed, system will update new defect detected results and display. No need to re-scan process.
  • From scan to review equal 0 second.
  • Preview various defect images at the same time. Different from ”Review must be waiting for scanning finished” Effectively reduce staff waiting time.
Measurement：
    Line width, Space width, Circular, Rectangle, Rotated Rectangle, Central distance, Gap Distance, Long Distance
Real-time multi-language：
    Change the language does not need to restart the software, suitable for multi-language environment. (Traditional Chinese, Simplified Chinese, English, Japanese)
Computer Backup Systems：
    Dual hard disk / dual operating system to quickly resolve system exceptions, real time switch, the system does not halt.
Automatic Stamp function：
    Marking the defect location on film

OverviewSpecial FunctionInspection abilityModel Comparison

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