Large inspection area, tiny defect out.
Large inspection area, tiny defect out. Min. defect size:3um
Large inspection area, tiny defect out. Autofocus can overcome defocus issue and take
Clear images.
Min. defect size:3um
Application
Inspect defects on the photomask/retcile by optical lens capturing system. The inspection system can reduce damages and promote product quality.
Autofocus can overcome defocus issue and keep
Clear images.
Performance
Performance：
< 10 min 0.84 µm/pixel (Inspection area：500 x 400mm)
Inspection ability：
Min. line /space width (critical dimension) : Down to 8.5µm
Min. defects size : 3 µm
System resolution : 0.84 um/pixel
Inspection mode: DRC can run with Data reference mode simultaneously. Inspection mode(Design Rule Check)：
To determine defect by user's parameters and system embedded logic.
Simple for operation and no need reference required.
Data reference：To compare captured image with reference data. We emphasized that lost PAD on the photomask, image shifted and change of pattern size.
Supported reference data format: Gerber RS274X, ODB++, GDSII and DXF(CAD).
Equipped with standalone workstation for preprocessing.
Real-time Autofocus：
During the inspection process, the height change is measured by the laser feedback, and the autofocus actuator track the height change quickly, and the autofocus is achieved.
Adjustable fixture：
Can fit with a variety of different sizes of mask.
When parameter or image changed, system will update new defect detected results and display.
Review on Fly：
You do not need waiting scanning finished for review, when the system start scanning you can star review the defects in the same time.
From scan to review equal 0 second.
Preview various defect images at the same time.
Different from ”Review must be waiting for scanning finished” Effectively reduce staff waiting time..
Measurement：
Line width, Space width, Circular, Rectangle, Rotated Rectangle, Central distance, Gap Distance, Long Distance.
Real-time multi-language：
Change the language does not need to restart the software, suitable for multi-language environment. (Traditional Chinese, Simplified Chinese, English, Japanese)
Computer Backup Systems：
Dual hard disk / dual operating system to quickly resolve system exceptions, real time switch, the system does not halt.
