| Model | TSL-FVT-EX4 | TSL-FVT-DX6.0 | TSL-FVT-DX6.5 | TSL-FVT-DX6 Super | TSL-FVT-DX6 Super high | TSL-FVT-DX6 Super high plus | TSL-SP7-LS3 | TSL-SP7-LS2 |
|---|---|---|---|---|---|---|---|---|
| Inspection Object | Film | Film / Photomask / Reticle | Film / Photomask / Reticle | Photomask / Reticle | Photomask / Reticle | Photomask / Reticle | Photomask / Reticle | Photomask / Reticle |
| Minimum line/space width | 40 um↑ | 15 um↑ | 15 um↑ | 8.5 um↑ | 6.5 um↑ | 4.5 um↑ | 3 um↑ | 2 um↑ |
| Minimum defect detection capability | 12 um | 5 um | 5 um | 3 um | 2 um | 1.5 um | 1 um | 0.75 um |
| Type of defect | Broken line, Pin hole, Dirt, Scratch, Circuit nick, Water Stain Shade. | |||||||
| DRC mode | ||||||||
| Data Reference mode | ||||||||
| Review on Fly | ||||||||
| Max. object size(mm) | Film840*665 | Film945*790 Photomask / Reticle800*700 |
Film945*790 Photomask / Reticle800*700 |
Photomask / Reticle800*700 | Photomask / Reticle800*700 | Photomask / Reticle800*700 | Photomask / Reticle800*700 | Photomask / Reticle800*700 |
| Inspection area(mm) | Film700*600 | Film880*700 Photomask / Reticle750*650 |
Film 880*700 Photomask / Reticle750*650 |
Photomask / Reticle750*650 | Photomask / Reticle750*650 | Photomask / Reticle750*650 | Photomask / Reticle750*650 | Photomask / Reticle750*650 |
| 機型 | TSL-FVT-EX4 | TSL-FVT-DX6.0 | TSL-FVT-DX6.5 | TSL-FVT-DX6 Super | TSL-FVT-DX6 Super high | TSL-FVT-DX6 Super high plus | TSL-SP7-LS3 | TSL-SP7-LS2 |
|---|---|---|---|---|---|---|---|---|
| Wait for review | 0 sec | 0 sec | 0 sec | 0 sec | 0 sec | 0 sec | 0 sec | 0 sec |
| Inspection time | < 90 sec | < 35 sec | < 35 sec | < 10 min | < 17 min | < 50 min | < 50 min | < 50 min |
| Resolution | 5 um/pixel | 5 um/pixel | 5 um/pixel | 0.84 um/pixel | 0.63 um/pixel | 0.36 um/pixel |
| 機型 | TSL-FVT-EX4 | TSL-FVT-DX6.0 | TSL-FVT-DX6.5 | TSL-FVT-DX6 Super | TSL-FVT-DX6 Super high | TSL-FVT-DX6 Super high plus | TSL-SP7-LS3 | TSL-SP7-LS2 |
|---|---|---|---|---|---|---|---|---|
| Dimensions/Weight | W1500*D1500*H1600(mm) / about 780 kg | W1450*D1650*H1600(mm) / about 1000kg | ||||||
| Power | 220 volt 1 phase 750W(Rated) 1KW(Peak) with Ground Wire | |||||||
| Photomask holder | Option | Option | Option | standard | standard | standard | standard | standard |
| Autofocus | ||||||||
| Work station | ||||||||
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