| Model | MVS 4 | MVS 6 |
|---|---|---|
| Inspection Object | Metal Mask/Stencil | |
| Applicable aperture | More than 80um | More than 30um |
| Minimum Defect | 12 um | 5 um |
| Resolution (um/pixel) | 4.0~6.6 | 1.5~5.5 |
| Max. inspection object W x D x H (mm) | 750 x 750 x 30 | |
| Max Inspection area (mm*mm) | 880 x 700 | |
| DRC mode | ||
| Data Reference mode | Option | |
| Review on Fly | ||
| Workstation | Option | |
| Measurement Single image accuracy Long Distance accuracy |
Line width, Space width, Circular, Rectangle, Rotated Rectangle, Central distance, Gap Distance, Long Distance ±1 pixel ±15um@600mm |
|
| Real-time multiple-language change | Traditional Chinese, English, simplified Chinese, Japanese | |
| Inspection area (mm) Inspection time Wait for review |
500 x 400 < 90 sec @ 5.0 um/pix 0 sec |
500 x 400 < 35 sec @ 5.0 um/pix 0 sec |
| Dimensions (mm) | W 1450 x D 1650 x H 1600 | |
| Weight (kg) | About 1000 kg | |
| Power | 220V(50Hz/60Hz) 1 phase/ under 750W(Rated) 1KW(Peak) with Ground Wire | |