In the early period, film and photomask are inspected by “light table”. However, there are great film/photomask need to be inspected, and it’s easy to make mistake by human inspection, for example human eye’s fatigue or human negligence. These mistakes will delay the shipment. So the AOI film/photomask system develops from human inspection.
The principle of AOI: Computer program is the core. The digital camera will capture the images, After the capturing the system will process the images with the pre-define recipe to detect the defects. The defects will be displayed for reviewing and repairing. The inspection system can reduce damages and promote product quality.
Advantages of AOI：