MVS6 adopts 2 types of inspection modes.
Inspection mode:
1. DRC：
To determine defect by user's parameters and system embedded logic. Simple operation and no need reference required.
2. Data reference：
To compare captured image with reference data. We emphasized that lost/extra PAD on the metal mask/stencil, image shifted and change of pattern size.
MVS6 adopts 2 types of inspection modes.
Inspection mode:
1. DRC：
To determine defect by user's parameters and system embedded logic. Simple operation and no need reference required.
2. Data reference：
To compare captured image with reference data. We emphasized that lost/extra PAD on the metal mask/stencil, image shifted and change of pattern size.
